SLQ-QT500 Datasheet by Sensirion AG

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- Liquid flow rates up to 120 ml/min
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SLQ-QT500 Liquid Flow Meter
High Purity Flow Meter for High Viscosity Applications
Liquid flow rates up to 120 ml/min
Dual calibration for IPA and H2O
Response time < 50 ms
Straight flow channel, no moving
parts
For a wide range of viscosities
Inert wetted materials (PFA, Quartz)
Product Summary
The SLQ-QT500 Liquid Flow Meter enables fast, non-invasive measurements of liquids for demanding high purity
applications. Dual calibration (water, H2O; and isopropyl alcohol, IPA) allows flow monitoring for water-based or
hydrocarbon-based liquids. The straight wetted flow path has no moving parts and is only made of PFA and Quartz.
Its excellent chemical compatibility makes the SLQ-QT500 the first choice, even for measuring aggressive
chemicals. The flow meter’s micro-thermal technology, in combination with the straight and obstacle-free flow path,
makes it the ideal solution for high-viscosity liquids.
Interface Options
Digital
- I2C-Bus
- RS485-Bus
- USB cable
Analog
- Voltage output (0-10 V)
- Current output (4-20 mA)
- Additional operation modes
For more information on communication, please refer to page 6 of this document.
Benefits of Sensirion’s CMOSens® Technology
High reliability and long-term stability
Industry-proven technology with a track record of more than 10 years
Designed for mass production
Low signal noise
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Content
1 Sensor Performance 3
2 Specifications 4
3 Sensor Output Signal Description 5
4 Communication Interface Description 6
5 Fluidic Specification and Connections 7
6 Mechanical Specifications 8
7 Cleanliness of Flow Path 9
8 Ordering Information 10
9 CE, REACH, RoHS, and WEEE 10
10 Important Notices 11
11 Headquarters and Subsidiaries 12
Accuracy/(We nfmaasuvad value) Accuracy/(We nfmaasuvad value) SLG-QTSDD Relafive Accuracy (in “/oaflha measund Value) will! IPA 0% smmsoo Absolute Accuracy (in w/sjwilh IPA 10% 5% ~ 0% “2? C . —A|23‘C I - Mamas 7:100 _ _ ms‘crw‘c — —-Re atabil i \ Fe “y E Repeatahmry \_ -- --.------/ gm 5% P—/ z 1 -------------------------------- 01 7250072000 4000 0 1000 2000 2500 10 100 1000 Flowra|e(u\’s PM Flowrefle (W: W) SLG-QTSDD Relafive Accuracy SLG-OTSW Absolute Accnlacy (in % cl m. mlasurad valulj wilh H20 (in uI/s) wilh mo —“?3'9 —A|23‘C - - Ats'csw'c 7:100 — — ms‘crw‘c ____ 1 Repeatabilny E g 10 g _____ 1 01 7250072000 4000 0 1000 2000 2500 10 100 1000 Fwawrateth H20) Humane (meme)
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1 Sensor Performance
Parameter
SLQ-QT500 (H2O)
Unit
Full scale flow rate
2000 (120)
µl/s (ml/min)
Flow meter output limit1
2500 (150)
µl/s (ml/min)
Accuracy below full scale 2
(whichever error is larger)
53
% of measured value
0.125
% of full scale
Repeatability below full scale
(whichever error is larger)
0.5
% of measured value
0.0125
% of full scale
Temperature coefficient
(additional error per °C; whichever is larger)
0.15
% measured value / °C
0.00375
% full scale / °C
Mounting orientation sensitivity4
1.0
% of full scale
Table 1: Performance of the SLQ-QT500 (all data for medium IPA, 23°C, unless otherwise noted)
1.1 Specification Charts
Figure 1: Flow meter accuracy and repeatability across the flow range. Relative error in % of measured value (left column) and
absolute error in µl/s (right column) for IPA (top) and H2O (bottom)
1
Flow rate at which the flow meter output saturates
2
Accuracy with straight inlet tube
3
Accuracy below ±1000 µl/s. See the charts for the accuracy specification between 1000 µl/s and 2500 µl/s
4
Maximum additional offset when mounted vertically
Parameter Symbol Candi Ions Min. Typrcat Max Units Comments Parameter Symbol Mrn. Typrcal Max Unrts Comments Ftow detectron response Dependrng an Resotmiun settrng Samplrng me far 9 bit Parameter
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2 Specifications
2.1 Electrical Specifications
This section describes the electrical specification when connecting directly to the sensor’s M8 connector for I2C
communication. The preferred mode of communication is via the SCC1 interface cables. See the respective SCC1
cable datasheets for further details.
Parameter
Symbol
Conditions
Min.
Typical
Max.
Units
Comments
Supply voltage DC
VDD
3.3
3.5
3.7
V
Supply current
IDD
Measurement
5.1
6.5
mA
VDD = 3.5 V
Table 2: DC characteristics
2.2 Timing Specifications
Parameter
Symbol
Min.
Typical
Max.
Units
Comments
Power-up time
tPU
25
ms
Time to sensor ready
Flow detection response
time
<50
ms
Response time to flow changes (63)
I2C SCL frequency
fI2C
100
400
kHz
Readout frequency
12.5
200
1000
Hz
Depending on Resolution setting. Sampling time for 9 bit
resolution: 1 ms, for 16 bit resolution: 74 ms.
Table 3: Timing specifications
2.3 Absolute Minimum and Maximum Ratings
Parameter
Rating
Unit
Operating temperature
+5 … +50 (+41 … +122)
°C (°F)
Operating humidity
0…95 %, non-condensing
% RH
Short term storage temperature5
-10 … +60 (+14 … +140)
°C (°F)
Short term storage humidity5
0…95 %, non-condensing
% RH
Maximum supply voltage
4.0
V
Table 4: Absolute minimum and maximum ratings
2.4 Electrical Connector and Pinout
The flow meter is equipped with a male connector type M8, 4-pin, threaded lock according to
IEC 61076-2-101 (Ed. 1)/ IEC 60947-5-2, and is compatible with Sensirion’s SCC1 interface cables.
Pin
1
SDA (data)
2
GND
3
VDD
4
SCL (clock)
Table 5: Electrical pinout
5
Flow path empty. Short term storage refers to temporary conditions during e.g. transport.
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3 Sensor Output Signal Description
3.1 Calibration Field Information
The SLQ-QT500 Liquid Flow meter holds two calibrations, one for isopropyl alcohol (IPA) and one for water. Each
calibration is stored on a separate calibration field (CF):
Calibration field 0: IPA (factory default)
Calibration field 2: H2O
The default calibration field (i.e. the active calibration field at power up) can be permanently changed via I2C or RS485
commands. Alternatively, the default calibration field can be changed using the USB-RS485 Sensor Viewer which is
part of the Flow Meter Kit and also available in the download center on the Sensirion liquid flow webpage.
www.sensirion.com/liquidflow-download
The standard calibrations cover the flow range from -2500 µl/s to +2500 µl/s. Extended calibration ranges for both IPA
and water are available on request.
3.2 Sensor Measurement Configuration
The default configuration of the SLQ-QT500 sensor’s micro-heater is optimized for the measurement of short dispensing
processes. For measuring continuous flow rates, a different setting for the micro-heater is preferred. The default setting
can be permanently changed via I2C or RS485 commands. Alternatively, the default heater setting can be changed using
the USB-RS485 Sensor Viewer software.
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4 Communication Interface Description
The preferred mode of operation for the SLQ-QT500 flow meter is via the digital RS485, analog 0-10 V, or analog
4-20 mA SCC1 interface cables.
4.1 Digital Communication via RS485-Bus
The SCC1-RS485 Sensor Cable for liquid flow meters provides communication via the RS485 interface for use in a
demanding industrial automation environment. In addition to the standard commands available in the I²C interface of
the flow meter, the incorporated microcontroller of the cable provides more complex logic such as a dispense volume
totalizer, automatic dispense detection, automatic heater control and a data buffer for asynchronous readout.
For further information please see the SCC1-RS485 Sensor Cable datasheet, available on
www.sensirion.com/liquidflow-download.
4.2 Analog 0-10 V Communication
The SCC1-ANALOG Sensor Cable allows simple and quick readout of Sensirion’s liquid flow meters by converting the
digital flow meter reading to an 0...10 V voltage output. The output scaling of the cable can be configured by the user
and the cable additionally features a configurable digital (high/low) output with two different modes of operation (Flow
Switch / Volume Counter).
For further information please see the SCC1-ANALOG Sensor Cable datasheet, available on
www.sensirion.com/liquidflow-download.
4.3 Analog 4-20 mA (0-20 mA) Communication
The SCC1-CURRENT Sensor Cable converts the sensor’s digital signal to a 4…20 mA (0…20 mA) current output. The
output scaling and the additional digital (high/low) output of the cable can be configured in the same way as for the
SCC1-ANALOG voltage output cable.
For further information please see the SCC1-CURRENT Sensor Cable datasheet, available on
www.sensirion.com/liquidflow-download.
4.4 Communication via USB Cable
The Sensirion SCC1-USB Sensor Cable provides an easy to use USB interface for laboratory and desktop use,
especially in combination with the USB-RS485 Sensor Viewer software. Additionally, the SCC1-USB is used to
configure the outputs of the SCC1-ANALOG and SCC1-CURRENT interface cables.
For further information please see the SCC1-USB Sensor Cable datasheet, available on
www.sensirion.com/liquidflow-download.
4.5 Digital Communication via I2C Bus
The SLQ-QT500 liquid flow meter has been designed for use with the SCC1 interface cables. For special applications,
direct communication with the flow meter via the standard I²C-interface is possible. The physical interface consists of
two bus lines, a data line (SDA) and a clock line (SCL) which need to be connected via pull-up resistors to the bus
voltage of the system.
These lines have to be used on 3.3 V level with a recommended clock frequency of 100 kHz. For the detailed
specifications of this I²C communication, please refer to specific I²C Application Notes from Sensirion.
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5 Fluidic Specification and Connections
Parameter
SLQ-QT500
Fluidic connection
PFA tube, 6.35 mm (1/4”) OD, 4.35 mm ID
Pressure drop (at 120 ml/min, IPA, 23°C, with full length PFA tube)
< 2 mbar
Total internal volume (including full length PFA tube)
5 ml
Table 6: Fluidic specifications
5.1 Fluidic Connection Method
Fluidic connection to the SLQ-QT500 is established by directly connecting to the sensor’s 1/4" outer diameter (OD)
PFA tubing. A variety of suitable fittings, connectors, and unions is available from different suppliers. Most connectors
for 1/4" OD plastic tubing will work. The exact type needs to be determined by the user depending on the user’s
application.
5.2 PFA Connection Tubing
The flow meter has been robustly engineered to ensure the internal PFA to Quartz interface provides a dependable
seal without using any additional adhesives or gasket sealing materials. This tightly integrated design prohibits any
disassembly without damaging internal components; never disassemble the flow meter or attempt to replace the PFA
tubing!
Shortening the PFA tubing by cutting to the desired length is possible. Please consider the following basic guidelines.
IMPORTANT NOTE: Make sure to always leave tubing of sufficient length (depending on the selected type of
fitting) before cutting the tube. Cutting the PFA tubing too short will require replacing the flow meter!
Basic guidelines:
PFA tubing is non-replaceable.
Use tubing adapters for 6.35 mm (1/4 inch) outer-diameter and 4.35 mm inner-diameter PFA tubing.
For optimum accuracy, it is recommended to leave the tubing on the inlet at its original length, and to keep it straight.
This is most important for low viscosity liquids at high flow rates. See table 5 for more details.
On the outlet side, the tubing can be cut or bent as needed, without affecting the flow meter’s accuracy for flow in
the positive direction (normal requirements for handling PFA tubing apply).
Bending of tubing and mounting orientation has no influence on the repeatability of the flow meter. To maintain the
same measurement conditions and benefit from the excellent repeatability of the SLQ-QT500, the position and
orientation of the flow meter and its connection tubing should be fixed after installation.
If the PFA tubing is cut, it must be ensured that sufficient length is left to connect the flow meter to your system.
Flow rate (µl/s)
1000
1500
2000
Kinematic viscosity (mm2/s)
1.0 (H2O at 23°C)
6 cm
9 cm
12 cm
2.5 (IPA at 23°C)
3 cm
4 cm
5 cm
5.0
2 cm
2 cm
3 cm
Table 7: Recommended minimum length of straight inlet tube depending on viscosity and flow rate. Important! This table lists the
recommended minimum length from a fluidic point of view. A greater length may be required depending on the selected type of fluidic
connector.
.
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6 Mechanical Specifications
Parameter
SLQ-QT500
Flow meter body dimensions
59 x 35 x 23.2 mm
Flow meter overall length including PFA tubing
360±10 mm
Total mass
~45 g
Inner diameter sensor tube
4.5 mm
Inner diameter PFA tube
4.35 mm
Outer diameter PFA tube
6.35 mm (1/4 inch)
Protection class
IP54
Maximum recommended operating pressure6
12 bar (175 psi)
Rated burst pressure
30 bar (435 psi)
Table 8: Mechanical specifications and pressure rating
Figure 2: Dimensions of the SLQ-QT500. All dimensions in mm.
6
Pressure limited by PFA tubing
SENSIRION SLQ-QTSOO 7H: season commm cm. IPA/CF21 H20 max 2000 uVs — flow -> 4- flow —
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6.1 Materials
Part
Material
Flammability
Connection tubing ¼”
PFA
UL-94 V-0
Capillary
Quartz
Not flammable
Table 9: Wetted materials
Part
Material
Flammability
Housing
PPS
UL-94 V-0
Screws and electrical connector
Stainless steel
Not flammable
Cables
Copper
Not flammable
ETFE
UL-94 V-0
Table 10: Non-wetted materials
6.2 Labels
The SLQ-QT500 has two labels on opposite sides of the housing. Both labels are solvent resistant and contain the
following information
Sensirion product name
Calibrations on the flow meter: calibration field (CF), type of liquid (H2O or IPA), full scale flow rate
Serial number as text and encoded in 2D bar code
Positive flow direction marked by arrow
Figure 3: Labels on SLQ-QT500
7 Cleanliness of Flow Path
7.1 Particles
The flow path of each SLQ-QT500 flow meter is flushed with ultra-pure water as a final production step before packing.
The flow meter is then sealed in PE film under ISO 5 clean room conditions. The particle count limit for the flushing
process is less than one detected particle per 1 ml of water, and the detection limit for particles is 100 nm in diameter.
Please contact Sensirion for general customer instructions on cleaning and clean handling of the flow meter.
CE
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8 Ordering Information
For OEM applications, the flow meter can be purchased in larger quantities without any additional parts. For optimum
performance, Sensirion recommends using the SLQ-QT500 flow meter in combination with the SCC1 interface cables.
For laboratory use and technology evaluation, the Flow Meter Kit SLQ-QT500 can be ordered.
This laboratory-package contains:
Liquid Flow Meter SLQ-QT500
PC Software (Viewer & Data Export Tool);
SCC1-USB 2m Sensor Cable with USB connector for plug-and-play connection to a PC
SCC1-Analog 2m Sensor Cable with 0-10 V voltage output.
Product
Article Number
SLQ-QT500 Liquid Flow Meter
1-100963-01
Flow Meter Kit SLQ-QT500
1-101004-01
Interface Cables:
SCC1-RS485 2m Sensor Cable Pigtail
1-100804-01
SCC1-RS485 5m Sensor Cable Pigtail
1-101122-01
SCC1-ANALOG 2m Sensor Cable Pigtail
1-101072-01
SCC1-ANALOG 10m Sensor Cable Pigtail
1-101219-01
SCC1-CURRENT 5m Sensor Cable Pigtail
1-101667-01
SCC1-USB Sensor Cable 2m
1-101007-01
Table 11: Ordering information
9 CE, REACH, RoHS, and WEEE
The SLQ-QT500 complies with requirements of the following directives and regulations:
The device complies with norm EN 50081-2 (Emission Test Series), EN 50082-2 (Immunity Test Series) and ESD
protection when used in combination with the SCC1-RS485, SCC1-ANALOG, or SCC1-CURRENT Sensor Cables.
EU Directive 1907/2006/EC concerning Registration, Evaluation, Authorization and Restriction of Chemicals
(REACH)
EU Directive 2002/65/EC on the restriction of certain hazardous substances in electric and electronic equipment (RoHS),
OJ01.01.2011
EU Directive 2002/96/EC on waste electrical and electronic equipment (WEEE), OJ13.02.2003; esp. its Article 6 (1) with
Annex II.
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10 Important Notices
10.1 Warning, Personal Injury
Do not use this product as safety or emergency stop devices or in any other application where failure of the product could result in
personal injury. Do not use this product for applications other than its intended and authorized use. Before installing, handling, using or
servicing this product, please consult the data sheet and application notes. Failure to comply with these instructions could result in
death or serious injury.
If the Buyer shall purchase or use SENSIRION products for any unintended or unauthorized application, Buyer shall defend, indemnify and hold
harmless SENSIRION and its officers, employees, subsidiaries, affiliates and distributors against all claims, costs, damages and expenses, and
reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized
use, even if SENSIRION shall be allegedly negligent with respect to the design or the manufacture of the product.
10.2 ESD Precautions
The inherent design of this component causes it to be sensitive to electrostatic discharge (ESD). To prevent ESD-induced damage and/or
degradation, take customary and statutory ESD precautions when handling this product.
10.3 Warranty
SENSIRION warrants solely to the original purchaser of this product for a period of 12 months (one year) from the date of delivery that this product
shall be of the quality, material and workmanship defined in SENSIRION’s published specifications of the product. Within such period, if proven to
be defective, SENSIRION shall repair and/or replace this product, in SENSIRION’s discretion, free of charge to the Buyer, provided that:
notice in writing describing the defects shall be given to SENSIRION within fourteen (14) days after their appearance;
such defects shall be found, to SENSIRION’s reasonable satisfaction, to have arisen from SENSIRION’s faulty design, material, or workmanship;
the defective product shall be returned to SENSIRION’s factory at the Buyer’s expense; and
the warranty period for any repaired or replaced product shall be limited to the unexpired portion of the original period.
This warranty does not apply to any equipment which has not been installed and used within the specifications recommended by SENSIRION for
the intended and proper use of the equipment. EXCEPT FOR THE WARRANTIES EXPRESSLY SET FORTH HEREIN, SENSIRION MAKES NO
WARRANTIES, EITHER EXPRESS OR IMPLIED, WITH RESPECT TO THE PRODUCT. ANY AND ALL WARRANTIES, INCLUDING WITHOUT
LIMITATION, WARRANTIES OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE, ARE EXPRESSLY EXCLUDED AND
DECLINED.
SENSIRION is only liable for defects of this product arising under the conditions of operation provided for in the data sheet and proper use of the
goods. SENSIRION explicitly disclaims all warranties, express or implied, for any period during which the goods are operated or stored not in
accordance with the technical specifications.
SENSIRION does not assume any liability arising out of any application or use of any product or circuit and specifically disclaims any and all liability,
including without limitation consequential or incidental damages. All operating parameters, including without limitation recommended parameters,
must be validated for each customer’s applications by customer’s technical experts. Recommended parameters can and do vary in different
applications.
SENSIRION reserves the right, without further notice, (i) to change the product specifications and/or the information in this document and (ii) to
improve reliability, functions and design of this product.
Copyright© 2018, by SENSIRION.
CMOSens® is a trademark of Sensirion
All rights reserved
Sensirion AG info@sensirion.com www.5ehsirion.com Sensirion Taiwan Co. Ltd phone: +886 3 55067 info@sensirion.com www.5ehsirion.com Sensirion Inc., USA phone: +1 312 690 585 info-us@sensirion.com www.5ensir1oh.com Sensirion Japan Co. Ltd. phone: +81 3 3444 494 info-‘g@sensirion.com www.5ensir1oh.co.'p Sens Korea Co. Ltd. phone: +82 31 337 77 info-kr@sensirion.com www.sensirion.co.kr Sensirion China Co. Ltd. phone: +86 755 8252 1 info-cn@sensirion.com www.sensirion.com.cn www.5ehsir1oh.com/distributors
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11 Headquarters and Subsidiaries
Sensirion AG
Laubisruetistr. 50
CH-8712 Staefa ZH
Switzerland
phone: +41 44 306 40 00
fax: +41 44 306 40 30
info@sensirion.com
www.sensirion.com
Sensirion Inc., USA
phone: +1 312 690 5858
info-us@sensirion.com
www.sensirion.com
Sensirion Korea Co. Ltd.
phone: +82 31 337 7700~3
info-kr@sensirion.com
www.sensirion.co.kr
Sensirion Japan Co. Ltd.
phone: +81 3 3444 4940
info-jp@sensirion.com
www.sensirion.co.jp
Sensirion China Co. Ltd.
phone: +86 755 8252 1501
info-cn@sensirion.com
www.sensirion.com.cn
Sensirion Taiwan Co. Ltd
phone: +886 3 5506701
info@sensirion.com
www.sensirion.com
To find your local representative, please visit www.sensirion.com/distributors
Revision Date Changes 4 July 2018 all l Editorial changes In match new datasheet layout
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Revision History of the SLQ-QT500 Datasheet
Revision
Date
Changes
Chapter Description
4
July 2018
all
Editorial changes to match new datasheet layout

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