SFM3000 Product Flyer Datasheet by Sensirion AG

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w Meter for Medical Applications SENSIRION
SFM3000 Mass Flow Meter for Medical Applications
Bidirectional Flow Measurement (± 200 slm)
Low Pressure Drop (< 150 Pa)
Excellent Accuracy (2 % m.v.)
Ultra Fast Measurement Speed (0.5 msec)
Medical-Grade Design
www.sensirion.com
The SFM3000 is a digital flow meter especially suitable for high-volume applications. The design of the flow channel results in
very low pressure drop through the sensor element, making it highly suitable for medical ventilation and respiration applica-
tions. The SFM3000 bidirectionally measures the flow of air and other non-aggressive gases at rates up to 200 slm with excel-
lent accuracy and extremely high speed. It outputs a 14-bit digital signal at a 2 kHz update rate. The signal is internally linear-
ized and temperature compensated. Furthermore, the SFM3000 flow meter operates at a 5 Vdc supply voltage and features a
digital 2-wire interface, making it easy to connect directly to a microcontroller.
High-Performance Measurement Principle
The outstanding performance of the SFM3000 sensor is
based on Sensirion’s patented CMOSens® Technology,
which combines the sensor element, signal processing
and digital calibration on an integrated MEMS micro-
chip. Thegas is measured by a thermal sensor element
toprovide anextended dynamic range and enhanced
long-term stability compared to other flow measuring
technologies. Thanks to this proven CMOSens® Tech-
nology,the flow meter is perfectly suited for high-quality
massproduction and is the ideal choice for demanding
and cost-sensitive OEM applications.
gas flow
temperature sensors
silicon
gap for pressure
equalization
silicon nitrite (glass)
heater
Thermal measurement principle for CMOSens® flow sensors
Designed for
demanding medical
applications!
SENSIRION TNE senson COMPANY
CMOSens® sensor
gas flow
flow bypass
flow channel
Customized solution
OEM Solutions on Demand
Our cutting-edge sensor technology empowers us to meet
complex requirements with innovative sensor solutions.
Sensirion is ready and able to modify existing standard de-
signs or develop new solutions tailored for specific customer
needs. Please contact us to discuss your requirements.
Specifications
Condition Value Unit
Flow Ranges Air/N2–200 … +200 slm
Processing Time 14 bit 0.5 ms
Accuracy (typ.)1 span
offset
± 2
± 0.05
% m.v.
slm
Repeatability (typ.) span
offset
±0.75
± 0.05
% m.v.
slm
Pressure Drop @60slm inlet mesh
no inlet mesh
< 100 / < 0.4
< 20 / < 0.08
Pa/”H2O
Pa/”H2O
Pressure Drop @200slm inlet mesh
no inlet mesh
< 600 / < 2.4
< 150 / < 0.6
Pa/”H2O
Pa/”H2O
Supply Voltage - 5 Vdc
Operating Pressure absolute 0.7 … 1.3 bar
Fitting -22 mm Conical connector (ISO 5356-1:2004)
Interface -digital, I2C -
10 /12
Applications
Ventilation
Anaesthesia
Respiratory Devices
Supply of Medical Gases
Sensirion Inc., USA
phone: +1 805 409 4900
info_us@sensirion.com
Sensirion Korea Co. Ltd.
phone: +82 31 345 0031 3
info@sensirion.co.kr
Sensirion Japan Co. Ltd.
phone: +81 3 3444 4940
info@sensirion.co.jp
Sensirion China Co. Ltd.
phone: +86 755 8252 1501
info@sensirion.com.cn
To find your local representative,
please visit www.sensirion.com/contact
www.sensirion.com
SENSIRION AG
Laubisruetistrasse 50
CH- 8712 Staefa ZH
Switzerland
phone: + 41 44 306 40 00
fax: + 41 44 306 40 30
www.sensirion.com
info@sensirion.com
1 The total error is a sum of span and offset error.

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